Ex parte KOJIMA et al. - Page 1




                                  THIS OPINION WAS NOT WRITTEN FOR PUBLICATION                                                                
                         The opinion in support of the decision being entered                                                                 
                         today (1) was not written for publication in a law                                                                   
                         journal and (2) is not binding precedent of the Board.                                                               
                                                                                                        Paper No. 21                          

                                    UNITED STATES PATENT AND TRADEMARK OFFICE                                                                 
                                                         ________________                                                                     
                                          BEFORE THE BOARD OF PATENT APPEALS                                                                  
                                                        AND INTERFERENCES                                                                     
                                                         ________________                                                                     
                                    Ex parte HIROSHI KOJIMA, YOSHIFUMI TAHARA                                                                 
                                                           and IZUMI ARAI                                                                     
                                                         ________________                                                                     
                                                        Appeal No. 95-0142                                                                    
                                                    Application 07/817,9611                                                                   
                                                         ________________                                                                     
                                                   HEARD:  February 5, 1998                                                                   
                                                         ________________                                                                     
                Before METZ, GARRIS and WALTZ, Administrative Patent Judges.                                                                  
                GARRIS, Administrative Patent Judge.                                                                                          

                                                        DECISION ON APPEAL                                                                    
                         This is a decision on an appeal from the final rejection of                                                          
                claims 14 through 19 and 21 through 28 which are all of the                                                                   
                claims remaining in the application.                                                                                          
                         The subject matter on appeal relates to a method of plasma-                                                          
                etching a wafer which includes the post-etching steps of                                                                      


                         1Application for patent filed January 8, 1992.  According                                                            
                to appellants, this application is a continuation of Application                                                              
                07/510,124, filed April 17, 1990, now abandoned.                                                                              
                                                                    -1-                                                                       




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