Ex Parte HUFF et al - Page 1



                             The opinion in support of the decision being entered today was not written                        
                                     for publication and is not binding precedent of the Board.                                


                                                                                                 Paper No. 18                  



                          UNITED STATES PATENT AND TRADEMARK OFFICE                                                            
                                                       __________                                                              

                                BEFORE THE BOARD OF PATENT APPEALS                                                             
                                               AND INTERFERENCES                                                               
                                                        __________                                                             
                                                Ex parte BRETT E. HUFF,                                                        
                                                       KEN SCHATZ,                                                             
                                                     MIKE MAXIM, and                                                           
                                                   WILLIAM G. PETRO                                                            
                                                       ___________                                                             
                                                  Appeal No. 2001-2510                                                         
                                                Application No. 09/001,350                                                     
                                                        __________                                                             
                                                         ON BRIEF                                                              
                                                        __________                                                             
              Before KIMLIN, WALTZ, and TIMM, Administrative Patent Judges.                                                    
              KIMLIN, Administrative Patent Judge.                                                                             

                                                  DECISION ON APPEAL                                                           
                      This is an appeal from the final rejection of claims 7-12, all the claims remaining                      
              in the present application.  Claim 7 is illustrative:                                                            
                      7.     A method of conducting a sputter etch comprising:                                                 
                             providing a semiconductor wafer having a wafer surface;                                           

                             providing a sputter etch system including an etch chamber having a wafer                          





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