Ex Parte Hsiao - Page 1




              The opinion in support of the decision being entered                  
              today was not written for publication in a law journal                
              and is not binding precedent of the Board.                            
                                                             Paper No. 15           

                     UNITED STATES PATENT AND TRADEMARK OFFICE                      
                                                                                   
                         BEFORE THE BOARD OF PATENT APPEALS                         
                                 AND INTERFERENCES                                  
                                                                                   
                               Ex parte TIEN-EN HSIAO                               
                                                                                   
                                Appeal No. 2003-1884                                
                             Application No. 09/837,943                             
                                                                                   
                                      ON BRIEF                                      
                                                                                   
         Before KIMLIN, GARRIS and WALTZ, Administrative Patent Judges.             
         KIMLIN, Administrative Patent Judge.                                       


                                 DECISION ON APPEAL                                 
              This is an appeal from the final rejection of claims 1-25,            
         all the claims in the present application.  Claim 1 is                     
         illustrative:                                                              
              1.  A cooling system for supplying a reaction chamber with            
         coolant during a semiconductor fabrication process; said cooling           
         system comprising:                                                         
              coolant supply circuitry which controls supply of said                
         coolant;                                                                   
              a coolant flow controller having a setpoint control to set a          
         flow of said coolant by transmitting a voltage signal to said              
         circuitry; and                                                             

                                        -1-                                         




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