Ex Parte PATRICK et al - Page 1



          The opinion in support of the decision being entered today was not written for
                    publication and is not binding precedent of the Board.          

                      UNITED STATES PATENT AND TRADEMARK OFFICE                     
                                     ____________                                   
                          BEFORE THE BOARD OF PATENT APPEALS                        
                                  AND INTERFERENCES                                 
                                     ____________                                   
                     Ex parte ROGER PATRICK and PHILLIP L. JONES                    
                                     ____________                                   
                                 Appeal No. 2005-0537                               
                              Application No. 08/925,985                            
                                     ____________                                   
                                       ON BRIEF                                     
                                     ____________                                   
         Before KRATZ, JEFFREY T. SMITH, and PAWLIKOWSKI, Administrative            
         Patent Judges.                                                             
         KRATZ, Administrative Patent Judge.                                        

                                  DECISION ON APPEAL                                
              This is a decision on appeal from the examiner's final                
         rejection of claims 1, 2, 4-10 and 25-33, which are all of the             
         claims pending in this application.                                        
                                     BACKGROUND                                     
              Appellants' invention relates to a method of etching a                
         substrate in a plasma processing chamber using a sacrificial               
         substrate holder for allegedly obtaining improved etch                     
         uniformity.  A further understanding of the invention may be               
         obtained by a reading of appealed claim 1, which is reproduced             
         below.                                                                     




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