1. A phase-shifting mask, comprising:
a phase shifting portion means for shifting a phase of a
transmission light lying on both one surface and another surface
of a transparent substrate, the two surfaces being at opposite
sides of the substrate, and each of the phase shifting portion
means projecting outwardly from each respective surface.
THE REFERENCES
Okamoto 5,045,417 Sep. 3, 1991
Levenson 0 090 924 Oct. 12, 1983
(European patent application)
Shigetomi et al. (Shigetomi)2 4-316047 Nov. 6, 1992
(Japanese Kokai patent publication)
THE REJECTIONS
Claims 1-7 stand rejected under 35 U.S.C. ' 103 as being
unpatentable over Okamoto in view of Levenson and over Shigetomi
in view of Okamoto.
OPINION
We have carefully considered all of the arguments advanced
by appellant and the examiner and agree with appellant that the
aforementioned rejections are not well founded. Accordingly,
these rejections will be reversed.
Appellant=s claimed invention, as it is most broadly recited
in claim 1, is a phase-shifting mask having phase-shifting
2 The November 6, 1992 publication date of Shigetomi is
subsequent to appellant=s May 29, 1992 filing date. Shigetomi
therefore is not prior art as to appellant=s claimed invention.
We nevertheless address the rejection over Shigetomi and Okamoto
in order to dispose of this rejection as to its merits.
Citations herein to Shigetomi are to an English translation
of this reference. A copy of this translation is provided to
appellant with this decision.
2
Page: Previous 1 2 3 4 5 6 7 8 9 Next
Last modified: November 3, 2007