THIS OPINION WAS NOT WRITTEN FOR PUBLICATION
The opinion in support of the decision being entered today (1) was not written
for publication in a law journal and (2) is not binding precedent of the Board.
Paper No. 12
UNITED STATES PATENT AND TRADEMARK OFFICE
_____________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
_____________
Ex parte MAN WONG
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Appeal No. 95-3611
Application 07/904,4191
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ON BRIEF
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Before GARRIS, WEIFFENBACH and PAK, Administrative Patent Judges.
GARRIS, Administrative Patent Judge.
DECISION ON APPEAL
This is a decision on an appeal from the final rejection of
claims 1 through 15 which are all of the claims in the
application.
The subject matter on appeal relates to a method for vapor
phase wafer cleaning comprising the steps of combining hydrogen
fluoride, hydrogen chloride and water vapor, and exposing the
1Application for patent filed June 25, 1992.
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Last modified: November 3, 2007