Appeal No. 95-2579
Application 08/134,707
The Claimed Subject Matter
The claims on appeal are directed to method of forming a pattern on a substrate using a solution
of a partially imidized polyamic acid. Claim 1 is representative of the claimed subject matter and reads as
follows:
1. A method of forming a pattern on a substrate comprising
(A) forming a first solution which comprises
(1) organic solvent, and
(2) monomers of
(a) diamine, and
(b) dianhydride, tetracarboxylic acid or ester of tetracarboxylic acid;
(B) polymerizing said monomers to form a polyamic acid soluble in said organic solvent;
(C) imidizing 10 to 95% of the amic acid groups in said polyamic acid to form a partially
imidized polyamic acid;
(D) forming a second solution of said partially imidized polyamic acid, which is more
concentrated than said first solution;
(E) applying said second solution to a substrate;
(F) evaporating the solvent from said second solution to form a coating of said partially
imidized polyamic acid on said substrate;
(G) using a process requiring exposure to light, removing a portion of said coating to form
a pattern on said substrate; and
(H) fully imidizing said partially imidized polyamic acid in said coating on said substrate.
-2-
Page: Previous 1 2 3 4 5 6 7 Next
Last modified: November 3, 2007