Appeal No. 1998-1871 Page 7
Application No. 08/383,112
references (i.e., Tezuka, Komiyama, Suzuki and Perlov) but
find nothing therein which would have suggested a heater
capable of sufficiently heating a semiconductor substrate in a
vacuum chamber to degas the substrate as set forth in the
claims under appeal.
Since all the limitations of the claims under appeal are
not suggested by the applied prior art, the decision of the
examiner to reject claims 1 through 8 under 35 U.S.C. § 103 is
reversed.
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