The opinion in support of the decision being entered today was not written for
publication and is not binding precedent of the Board.
Paper No. 20
UNITED STATES PATENT AND TRADEMARK OFFICE
_____________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
_____________
Ex parte IH-CHIN CHEN
_____________
Appeal No. 1998-2884
Application No. 08/495,960
______________
ON BRIEF
_______________
Before JERRY SMITH, RUGGIERO, LEVY, Administrative Patent
Judges
RUGGIERO, Administrative Patent Judge.
DECISION ON APPEAL
This is a decision on the appeal from the final rejection
of claims 13-19, 21-26, and 28, which are the only claims
remaining in the application.
The disclosed invention relates to semiconductor
fabrication processes and particularly to a method of forming
a trench isolation structure in a stack trench capacitor
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