Ex parte GEISS et al. - Page 4




          Appeal No. 1999-0875                                                        
          Application No. 08/467,353                                                  


          results in unwanted compressive stresses in layer 10                        
          surrounding the collar 41.  Such stresses result in elastic                 
          deformation or strain outward from the trench.  To avoid such               
          stresses, a volume reduction is achieved in collar 41 or in                 
          material 51, or both.  Significant volume reduction is                      
          achieved by increasing the amount of hydrogen in the as-                    
          deposited films 41 and 51, and later driving off most if not                
          all of the hydrogen (dehydrogenation) during heat treatment.                




                                    The Prior Art                                     
          In Figures 2a and 2b, Nakata discloses a chip type                          
          tantalum capacitor which has an insulation resin frame 21 with              
          a tantalum capacitor element 1 enclosed in the frame.  The                  
          structure includes metal foil terminals 31 and 32, and lead                 
          wires 5a and 5b.                                                            
          Figs. 5 of Nakata illustrate a process of making the chip                   
          type capacitor.  The capacitor element is placed in cavity 11               
          of resin housing 7.                                                         
          Kubo discloses a method of producing a titanium-aluminum                    
          alloy porous body for a solid electrolytic capacitor in order               
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