The opinion in support of the decision being entered today was not
written for publication and is not binding precedent of the Board.
Paper No. 26
UNITED STATES PATENT AND TRADEMARK OFFICE
__________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
__________
Ex parte HIROSHI NOGAMI
__________
Appeal No. 1999-2117
Application No. 08/795,197
__________
ON BRIEF
__________
Before GARRIS, WARREN, and TIMM, Administrative Patent
Judges.
GARRIS, Administrative Patent Judge.
DECISION ON APPEAL
This is a decision on an appeal from the final
rejection of claims 1-15 which are all of the claims in
the application.
The subject matter on appeal relates to a plasma
processing method using helicon wave excited plasma
comprising controlling dissociation of a processing gas
by setting an applied source power lower than a source
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