Ex Parte YAGIHASHI et al - Page 9




          Appeal No. 1999-2119                                                        
          Application No. 08/815,410                                                  

          cannot be accepted as establishing that (1) these disulfones                
          would materially affect the basic and novel characteristics of              
          the here claimed resist materials and thus (2) are excluded by              
          the “consisting essentially of” claim language.                             
               Finally, it is the appellants’ position that their                     
          declaration evidence of record establishes that the here claimed            
          resist materials, by virtue of onium salts having only one or two           
          t-alkoxy substituted phenyl groups, exhibit unexpected results              
          compared to resist materials having tris substituted onium salts            
          of the type exemplified by Schwalm ‘265.  Again, however, this              
          declaration evidence is extremely narrow in scope relative to the           
          scope of the independent claim on appeal.  For example, the                 
          inventive compositions in all of these declarations involve only            
          4-t-butoxyphenyl substituted onium salts.  The appellants’                  
          independent claim, however, undeniably encompasses an                       
          exceptionally large number and variety of mono and di substituted           
          onium salts having only one or two t-alkoxy substituted phenyl              
          groups.                                                                     
               As explained in our decision on the related appeal, evidence           













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