Ex Parte JUNG - Page 13



          Appeal No. 2001-0107                                                        
          Application No. 09/143,505                                                  

          obviousness requires more than proof of reasonableness.  Most               
          inventions are, after all, reasonable.  The additional                      
          requirement is substantial evidence that the modification and its           
          reasonableness would have been recognized.  The record developed            
          by the examiner is inadequate because it lacks substantial                  
          evidence supporting positioning an exposure mask between the                
          chamber window and the substrate.  The incidental character of              
          Kondo’s disclosures regarding masks leaves a vacuum that the                
          examiner’s attempts to fill by reference to common knowledge or             
          common sense cannot fill.                                                   
                               Further considerations                                 
               In the event of further prosecution, we recommend that the             
          examiner and Appellant consider the following issues.                       
               a.   What is the scope of the term “substantially block the            
          byproduct from reaching the window”?  This term is present in               
          claim 1, but absent from independent claims 19 and 29, and all              
          claims dependent on the latter two but for claims 35 and 36,                
          which were added after the final rejection.  (See Paper No. 13.)            
          The term was introduced to independent claim 1, apparently from             
          original dependent claim 5, in the amendment responding to the              
          first office action on the merits.  (See Paper No. 5, filed May             
          27, 1999, at 1–2.) There is no limiting condition in the claims             
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