Ex Parte LIU et al - Page 5




              Appeal No. 1999-2596                                                                                        
              Application No. 08/866,773                                                                                  


                     The burden of establishing a prima facie case of unpatentability rests upon the                      
              Examiner.  See In re Oetiker, 977 F.2d 1443, 1445, 24 USPQ2d 1443, 1444 (Fed. Cir.                          
              1992); In re Piasecki, 745 F.2d 1468, 1472, 223 USPQ 785, 788 (Fed. Cir. 1984).   The                       
              Examiner has not provided motivation for forming a photoresist on the semiconductor                         
              device formed by Ajika.  The Examiner also has not pointed out where the Ajika, Nakamura                    
              and Yu references disclose the formation of a photoresist on the barrier layer which is                     
              subjected to etching.  The mere fact that the prior art could be modified would not have                    
              made the modification obvious unless the prior art suggests the desirability of the                         
              modification.  In re Gordon, 733 F.2d 900, 902, 221 USPQ 1125, 1127 (Fed. Cir. 1984);                       
              In re Laskowski, 871 F.2d 115, 117, 10 USPQ2d 1397, 1398 (Fed. Cir. 1989).  The record                      
              indicates that the motivation relied upon by the Examiner for selection the specific order of               
              steps comes from the Appellants’ description of their invention in the specification rather                 
              than coming from the applied prior art and that, therefore, the Examiner used impermissible                 
              hindsight in rejecting the claims.  See W.L. Gore & Associates v. Garlock, Inc., 721 F.2d                   
              1540, 1553, 220 USPQ 303, 312-13 (Fed. Cir. 1983); In re Rothermel, 276 F.2d 393, 396,                      
              125 USPQ 328, 331 (CCPA 1960).  Accordingly, we reverse the Examiner’s rejection under                      
              35 U.S.C. § 103(a) over Ajika, Nakamura, Yu, Lee and the admitted prior art.                                



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