Appeal No. 2001-1690
Application 08/859,407
3. Claim 5 stands rejected under 35 U.S.C. § 103 as
unpatentable over Mignardi in view of Trah and Glenn.
We reverse as to all three grounds of rejection.
BACKGROUND
The invention relates to a method of fabricating a
micromechanical device. The method is particularly applicable to
the production of deflectable mirror devices or digital micro-
mirror devices (“DMD’s”). See specification, page 7, line 30 -
page 8, line 3. In general, a DMD is a multi-layered
micromechanical structure formed on a wafer having a light-
reflective beam or other similar mechanical member.
Specification, page 3, lines 2-3. The beam is deflected in
response to electrostatic attraction toward (or to) an underlying
adjacent electrode which is at a different electrical potential
from that of the beam. Id., lines 9-12. Deflection of the beam
is facilitated by an undercut well beneath the beam which is
formed by etching a spacer layer of material deposited on the
wafer. Id., lines 17-19.
A problem which occurs during the manufacture of DMD’s
is that debris may enter the undercut well and prevent deflection
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