The opinion in support of the decision being entered
today was not written for publication and
is not binding precedent of the Board.
Paper No. 18
UNITED STATES PATENT AND TRADEMARK OFFICE
_______________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
_______________
Ex parte KEI-YU KO, LI LI AND GUY T. BLALOCK,
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Appeal No. 2002-0702
Application No. 09/711,324
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ON BRIEF
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Before KIMLIN, GARRIS and OWENS, Administrative Patent Judges.
GARRIS, Administrative Patent Judge.
DECISION ON APPEAL
This is a decision on an appeal which involves claims 1-38.
These are all of the claims in the application.
The subject matter on appeal relates to a dry etchant
comprising a component having a particular general formula,
wherein the dry etchant is formulated to etch doped silicon
dioxide with a selectivity over (e.g., at a faster rate than)
1
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