Ex Parte INAGAWA et al - Page 2




          Appeal No. 2002-1201                                                        
          Application No. 09/026,575                                                  


               At the outset, appellants correctly point out that claims 17           
          and 18, which are dependent upon independent claim 16, stand or             
          fall together with separately argued claim 16, and claims 20-22,            
          which are dependent upon independent claim 19, stand or fall                
          together with separately argued claim 19.                                   
               Appellants contend that "[t]he Board further errs in                   
          supporting all grounds of rejection of claims 1-3 and 5-15 by               
          stating that claims 1-3 and 5-15 do not require that the shadow             
          frame and the substrate be out of contact during processing"                
          (page 2 of Request, second paragraph).  Appellants urge that                
          "[r]epresentative claim 1 specifies a 'substrate being processed'           
          and a shadow frame positionable with a gap between an underside             
          of the shadow frame and an upper surface of the substrate being             
          processed" (id.).  However, we maintain our agreement with the              
          examiner that the claim language does not require that the shadow           
          frame and substrate be out of contact during processing.  The               
          claim language simply requires that the shadow frame be capable             
          of being positioned with a gap between its underside and the                
          upper surface of the substrate.  Appellants have not                        
          demonstrated, or even argued, that the apparatus of White does              
          not possess this capability.  Appellants acknowledge that process           
          claims 16 and 19 "do not require a gap between the substrate                


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