Ex Parte M et al - Page 1



                         The opinion in support of the decision being entered today                          
                                   is not binding precedent of the Board.                                    

                        UNITED STATES PATENT AND TRADEMARK OFFICE                                            
                                            ________________                                                 
                             BEFORE THE BOARD OF PATENT APPEALS                                              
                                         AND INTERFERENCES                                                   
                                            ________________                                                 
                          Ex parte HICHEM M’SAAD and ANCHUAN WANG                                            
                                            ________________                                                 
                                             Appeal 2007-1851                                                
                                          Application 10/020,461                                             
                                          Technology Center 1700                                             
                                            ________________                                                 
                                          Decided:  June 15, 2007                                            
                                            ________________                                                 
                Before EDWARD C. KIMLIN, BRADLEY R. GARRIS, and                                              
                CHARLES F. WARREN, Administrative Patent Judges.                                             
                KIMLIN, Administrative Patent Judge.                                                         

                                         DECISION ON APPEAL                                                  
                      This is an appeal from the final rejection of claims 1-4, 6-13, 15, 16,                
                and 21-42.  Claim 1 is illustrative:                                                         
                      1.   A method of forming an optical waveguide, the method                              
                comprising:                                                                                  
                            flowing a silicon source gas into a process chamber;                             
                            flowing an oxygen source gas into the process chamber;                           

                                                                                                            



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