Appeal 2007-2483
Application 09/899,183
control.21 Li's FIG. 2 (right,
color added) shows a
vaporizer. Li's vaporizer has
a feed tube 22 that brings
the CVD source materials
to the vaporizer. The feed
tube 22 leads to an
ultrasonic nozzle 24, which
sprays the source material
into a chamber 6. A
cooling jacket 26 surrounds
the nozzle 24. A curtain
gas inlet 28 adjacent to the
cooling jacket 26 feeds in curtain gases 27 along the walls of the chamber.22
The unnumbered plate (in red) appears to define an inlet into the chamber 6
and to position the nozzle 24 such that it sprays through the inlet and into the
chamber 6. The unnumbered neck (green) connecting the cooled upper
delivery component from the heated lower expansion component is narrow
and provides a degree of separation between the two components.
21 Li 1:11-15.
22 Li 10:13-26. Li's text at this point actually labels the cooling gas "25",
which cannot be correct. When discussing a later embodiment (12:47-50),
Li uses "27' and 27"" to indicate the curtain gases and "25' and 25"" to label
nozzle mounting segments, which makes more sense.
7
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Last modified: September 9, 2013