UNITED STATES PATENT AND TRADEMARK OFFICE
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BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
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Ex parte ANGELA T. HUI
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Appeal 2007-3197
Application 10/871,131
Technology Center 1700
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Decided: October 29, 2007
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Before EDWARD C. KIMLIN, THOMAS A. WALTZ, and
JEFFREY T. SMITH, Administrative Patent Judges.
KIMLIN, Administrative Patent Judge.
DECISION ON APPEAL
This is an appeal from the final rejection of claims 1-20. Claims 21-
37 stand withdrawn from consideration. Claim 1 is illustrative:
1. A system for in-situ surface treatment in fashioning a memory cell
comprising:
a gas distribution system that selectively provides a fluorine (F) based
gas into a processing chamber; and
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