Ex parte FU - Page 4




          Appeal No. 95-3451                                                          
          Application No. 08/097,588                                                  


               The appellant “acknowledges that the gas ejector ring 260              
          disclosed in Figures 12 and 13 [of Hansen] is within the broad              
          description of Appellant’s gas diffuser 10” but argues that                 
          “[e]ach of the claims on appeal, however, includes limitations              
          which are not disclosed by Hansen” (Brief, page 6).                         
               Specifically, the appellant argues that Hansen contains                
          no teaching or suggestion of the independent claim 9                        
          limitation of “said gas diffuser having a circumferential                   
          radius less than or equal to the radius of said tube.”  We                  
          cannot agree.  Patentee discloses a processing chamber (e.g.,               
          see 104 of Figure 3) having gas injector rings (see 108 and                 
          110 of Figure 3) which are shown more specifically in Figures               
          12 and 13 as comprising an inlet port 266 leading to ring 264               
          which supports diffusing means 262 (see columns 22 and 23).                 
          Particularly in light of the appellant’s previously mentioned               
          acknowledgment, we consider it reasonable and consistent with               
          the subject specification to interpret the appealed claim 9                 
          tube as reading on Hansen’s inlet port 266/support ring 264.                
          In re Sneed, 710 F.2d 1544, 1548, 218 USPQ 385, 388 (Fed. Cir.              
          1983) (application claims are to be given their broadest                    
          reasonable interpretation consistent with the specification).               
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