Ex parte UEDA et al. - Page 4




          Appeal No. 95-4663                                                          
          Application 08/044,487                                                      


          formula (I) as set forth in appealed claim 1.  The positive                 
          photoresist composition of the present invention is said to                 
          exhibit advantageous resolution, profile and sensitivity                    
          properties.                                                                 
               The examiner’s prima facie case of obviousness is predicated           
          on the contention that it would have been obvious to a person of            
          ordinary skill in the art to modify the photoresist composition             
          taught by Uetani by using the dissolution inhibitor taught by               
          Lamola and the photoinduced acid precursor taught by Renner to              
          produce a positive photoresist composition, because each                    
          component is used for its intended purpose and one would expect             
          that ?known components used in positive photoresists compositions           
          would perform in known and expected manners?.  See the Answer at            
          pages 3 and 4.  In support of this rejection the examiner                   
          correctly factually determined that Uetani teaches a positive               
          photoresist composition containing an alkali soluble novolak                
          resin which is identical to the claimed alkali-soluble resin                
          (i.e., an alkali-soluble resin obtained through a condensation              
          reaction of an aldehyde with a phenol compound including a                  
          compound of general formula (I) as recited in claim 1).  However,           
          a quinone diazide compound is also an essential component of the            
          radiation-sensitive composition disclosed by Uetani.  See Uetani            

                                          4                                           





Page:  Previous  1  2  3  4  5  6  7  8  Next 

Last modified: November 3, 2007