THIS OPINION WAS NOT WRITTEN FOR PUBLICATION
The opinion in support of the decision being entered
today (1) was not written for publication in a law
journal and (2) is not binding precedent of the
Board.
Paper No. 21
UNITED STATES PATENT AND TRADEMARK OFFICE
____________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
____________
Ex parte ISRAEL BEINGLASS and MAHALINGAM VENKATESAN
____________
Appeal No. 95-3438
Application No. 08/033,6561
____________
HEARD: February 8, 1999
____________
Before JOHN D. SMITH, WARREN and LIEBERMAN, Administrative
Patent Judges.
JOHN D. SMITH, Administrative Patent Judge.
DECISION ON APPEAL
This is an appeal pursuant to 35 U.S.C. § 134 from the
final rejection of claims 1 through 7.
The subject matter on appeal is directed to a method of
depositing a stoichiometric silicon nitride film of uniform
thickness on a single substrate (e.g., a single large diameter
1Application for patent filed March 16, 1993.
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