Appeal No. 1996-0200
Application 08/119,444
production. The susceptor comprises an aluminum alloy base having a roughened
surface and an anodized coating on the surface of the aluminum and is made by
roughening the aluminum alloy base and anodizing the susceptor in an electrolyte
comprising an organic acid. Claims 1, 22 and 31 are illustrative of the invention and read
as follows:
1. A method of making an improved high temperature-resistant anodized aluminum
susceptor used in apparatus for treatment of materials used in semiconductor devices
comprising the steps of:
(a) fabricating an aluminum susceptor comprising an aluminum alloy; and
(b) anodizing said susceptor in an electrolyte comprising an organic acid to provide
said high temperature resistant anodized coating on said susceptor.
22. An improved aluminum susceptor resistant to high temperature without
substantial cracking and used in apparatus for treatment of materials used in
semiconductor devices, the susceptor comprising: a base comprised of an aluminum alloy
containing not more than 0.05 wt.% magnesium; a roughened surface; and an anodic
coating comprised of an organic acid anodic coating on said surface.
31. An improved aluminum susceptor resistant to high temperature and cracking
and used in apparatus for treatment of materials used in semiconductor devices, the
susceptor comprised of:
(a) an aluminum alloy having a surface roughness; and
(b) an anodic coating formed on said aluminum susceptor by anodizing said
aluminum susceptor in an organic acid electrolyte and resistant to cracking and peeling at
high temperatures.
2
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