Ex parte THACKERAY - Page 5




          Appeal No. 1997-0106                                                        
          Application 07/792,482                                                      


          vacuum but instead must be read in the light of the                         
          specification).                                                             
               For the reasons set forth above, the subject matter                    
          defined by the claims is particular and definite.  Therefore,               
          the rejection of claims 36-39, 44-47, 49-58, 60, 61, 63, 66-68              
          and 70 under 35 U.S.C. § 112, second paragraph, is reversed.                





               B.  Rejection under 35 U.S.C. § 112, first paragraph                   
                         1.  Enablement                                               
               According to the examiner, "the disclosure is enabling                 
          only for claims limited to the disclosed methods of altering                
          the                                                                         
          surface of the underlying substrate, such as etching."                      
          Answer, pp. 5-6.  Presumably, the relevant claim language is                
          the phrase "altering the underlying substrate" recited in                   
          subparagraph (h) of claims 36, 56 and 66.                                   
               Appellants argue that "[t]he art is fully aware of how a               
          substrate is altered following photolithographic mask                       
          formation" (Brief, p. 11) and rely on several publications in               

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