Ex parte BELCHER et al. - Page 4




                 Appeal No. 1998-1667                                                                                                                   
                 Application No. 08/224,211                                                                                                             

                          The examiner has agreed that Sandhu does not explicitly                                                                       
                 disclose or teach the use of an external polishing member                                                                              
                 (Answer, page 5).  The examiner has not submitted any                                                                                  
                 convincing evidence and/or reasoning to support the contention                                                                         
                 that it is conventional in the CMP art to use an external                                                                              
                 polishing member.   Regardless, from the disclosure of Sandhu1                                                                                                       
                 as a whole, we determine that the mechanical aspect of the CMP                                                                         
                 in this reference was achieved by the use of solid polishing                                                                           
                 particulates.  See Sandhu at col. 3, ll. 17-23:                                                                                        
                                   The chlorides and sulfates are removed by chemical-                                                                  
                                   mechanical polishing action in the same polishing                                                                    
                                   treatment.  Such removal action might result in the                                                                  
                                   chemical aspect of the chemical-mechanical polishing                                                                 
                                   predominating, or in the mechanical aspect from                                                                      
                                            interaction with the slurry particles                                                                       
                 predominating.                               (Emphasis added).                                                                         
                          Sandhu also teaches, at col. 4, ll. 40-42:                                                                                    
                                   The formed BaO and SrO material would then be                                                                        
                 removed                    by the mechanical polishing and/or chemical                                                                 


                          1We note that Cadien et al., U.S. Patent No. 5,516,346,                                                                       
                 with an apparent filing date for the parent application of                                                                             
                 Nov. 3, 1993, was cited in the Advisory Action dated Nov. 19,                                                                          
                 1996, Paper No. 10, to show that CMP conventionally occurs                                                                             
                 with a polishing pad but was specifically not relied upon in                                                                           
                 the rejection in the examiner’s Answer (Answer, page 7).                                                                               
                 Therefore we do not consider this reference as evidence of                                                                             
                 obviousness in the rejection in this appeal.  See In re Hoch,                                                                          
                 428 F.2d 1341, 1342 n.3, 166 USPQ 406, 407 n.3 (CCPA 1970).                                                                            
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