The opinion in support of the decision being entered today
was not written for publication and is not binding precedent of
the Board.
Paper No. 23
UNITED STATES PATENT AND TRADEMARK OFFICE
_______________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
_______________
Ex parte MICHIO SATO, TAKASHI YAMANOBE,
TOHRU KOMATSU, YOSHIHARU FUKASAWA, NORIAKI YAGI,
TOSHIHIRO MAKI and HIROMI SHIZU
______________
Appeal No. 1998-1728
Application 08/397,243
_______________
HEARD: January 18, 2001
_______________
Before GARRIS, WARREN and LIEBERMAN, Administrative Patent Judges.
WARREN, Administrative Patent Judge.
Decision on Appeal
This is an appeal under 35 U.S.C. § 134 from the decision of the examiner finally rejecting
claims 1 through 5 and 11 through 13. Claims 6 through 10, also of record, have been allowed by the
examiner. Claims 1 and 2, as they stand of record (specification, page 68), are illustrative of the claims
on appeal:
1. A refractory metal silicide target, comprising a fine mixed structure composed of MSi2
(where M: at least one refractory metal selected from W, Mo, Ti, Ta, Zr, Hf, Nb, V, Co, Cr, Ni) grains
and Si grains, wherein the number of MSi2 grains independently existing in a cross section of 0.01 mm2
of the mixed structure is not greater than 15, the MSi2 grains have an average grain size not greater than
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