Ex Parte CHEUNG et al - Page 1






                                       The opinion in support of the decision being entered                                           
                                   today was not written for publication and is not binding                                           
                                   precedent of the Board.                                                                            
                                                                                              Paper No. 23                            

                                   UNITED STATES PATENT AND TRADEMARK OFFICE                                                          
                                                        _______________                                                               
                                        BEFORE THE BOARD OF PATENT APPEALS                                                            
                                                     AND INTERFERENCES                                                                
                                                        _______________                                                               
                                             Ex parte DAVID CHEUNG, JOE FENG,                                                         
                                             JUDY H. HUANG and WAI-FAN YAU                                                            
                                                         ______________                                                               
                                                      Appeal No. 2000-1004                                                            
                                                      Application 08/743,628                                                          
                                                        _______________                                                               
                                                             ON BRIEF                                                                 
                                                        _______________                                                               
               Before WARREN, LIEBERMAN and TIMM, Administrative Patent Judges.                                                       
               WARREN, Administrative Patent Judge.                                                                                   
                                                        Decision on Appeal                                                            
                       This is an appeal under 35 U.S.C. § 134 from the decision of the examiner finally                              
               rejecting claims 1, 2, 9 through 11, 22, 24 and 25, and refusing to allow claims 15 and 23 as                          
               amended subsequent to the final rejection.  Claims 3 through 8 and 12 through 14 are also of                           
               record and have been allowed by the examiner.  Claims 1, 9 and 15 are illustrative of the claims                       
               on appeal:                                                                                                             
                       1.  A method for reducing footing in a photoresist layer deposited on a substrate,                             
               comprising the steps of:                                                                                               
                       depositing an antireflective layer comprising silicon, oxygen and nitrogen on the                              
               substrate; and                                                                                                         
                       depositing a capping layer on said antireflective layer, said capping layer having a                           
               nitrogen content less than a nitrogen content of said antireflective layer.                                            


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