Appeal No. 2000-1846
Application No. 08/709,879
APPENDIX A
Claim 52
52. A method of enhancing miscibility of a resist
film, which comprises
1) preparing a uniform mixture, comprising:
(a) a polymer obtained by protecting an
alkali-soluble group of an alkali-soluble polymer by a
group which is unstable to an acid;
(b) a compound which generates an acid upon being
irradiated with light; and
(c) at least one compound which is selected from
the group consisting of an imidazole compound, an
alanine compound, an adenine compound, an adenosine
compound, and a quaternary ammonium salt compound, and
which increases miscibility in the resist film; and
2) applying said uniform mixture on a substrate,
wherein with addition of the component (c), the
miscibility of the resist film is enhanced, phase
separation of the resist film is avoided when the
resist film is formed, and the components have a
uniform concentration distribution within the film, and
wherein said polymer (a) has repeating units of
the formula:
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