Appeal No. 2001-2039
Application No. 09/110,207
the reference that relates to the claimed first and second
electrodes, the recess structure or the relative resistivity of
the insulating layers.
Turning now to Logan, we find that the reference requires
the same resistivity for the insulating layer over the first
electrode in the recess and the electrostatic attraction layer
since the same insulator 28 forms both layers (col. 6, lines 2-4
and 36-39). There is, in fact, nothing in Logan that points to
an insulating layer in the recess that is different from the
electrostatic attraction layer over the top surface of the chuck,
nor any disclosure related to the relative resistivity of such
layers.
We agree with Appellants’ assertion (reply brief, pages 6 &
7) that the combination of Nagasaki with Harada and Logan fails
to teach or suggest the specific structure of the two electrodes
as well as the relationship between the electrostatic layer and
the insulating layer formed in the recess. As discussed above,
Logan does not recognize the need for insulating layers having
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