Appeal No. 2003-1884
Application No. 09/837,943
a filter for removing noise from said voltage signal to
stabilize said flow of said coolant.
The examiner relies upon the following references as
evidence of obviousness:
Tsubone et al. (Tsubone) Hei 5-49904 Mar. 02, 1993
(Japanese Kokai Patent Application)
Nakagawa Hei 7-161696 Jun. 23, 1995
(Japanese Kokai Patent Application)
Matsumura Hei 11-284016 Oct. 15, 1999
(Japanese Kokai Patent Application)1
Ralph J. Smith, Circuits, Devices, and Systems- A First Course in
Electrical Engineering 158-61, 511-13 (3d ed., John Wiley & Sons,
Inc., New York 1966)
MKS Product Announcement (May 25, 1999)
Appellant's claimed invention is directed to a cooling
system for a reaction chamber used in a semiconductor fabrication
process. The system comprises a coolant flow controller having a
setpoint control to set a flow of the coolant by transmitting a
voltage signal to coolant supply circuitry. The system also
comprises a filter for removing noise from the voltage signal.
The removal of noise by the filter allows for a stable flow of
coolant which results in uniform contact between a semiconductor
wafer and its supporting chuck.
1 We rely upon full English translations of Tsubone,
Nakagawa, and Matsumura, all previously made of record.
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