Appeal No. 2006-0378 3
Application No. 10/052,703
plurality of coolant inlets, a plurality of coolant outlets, and
a plurality of inner cooling lines configured to connect the
inlets and outlets. Claim 1 reads as follows:
1. A shower head for supplying a reaction gas to
a wafer in a process chamber, the shower head
comprising:
a plurality of plates comprising gas paths for
supplying a reaction gas to a wafer; and
a cooling system comprising a plurality of coolant
inlets and a plurality of coolant outlets formed in a
lower one of the plurality of plates, and further
comprising a plurality of inner cooling lines
configured to connect each of the plurality of coolant
inlets to one of the plurality of coolant outlets.
According to the Examiner, Chen describes a cooling system
22 comprising a plurality of coolant inlets 56 and a plurality of
coolant outlets 62 as shown in Figure 5. The Examiner further
finds that the passageways between 56 and 62 are a plurality of
inner cooling lines as claimed. Appellants argue that Chen
describes a single passageway 56 with a single vertical inlet
hole 66 and a similar outlet hole 68 (Brief, pp. 4-8). According
to Appellants, there being only one inlet, one passageway, and
one outlet in the plate of Chen, there is no anticipation. The
Examiner sees no difference between the structure of Chen and the
claimed cooling system because both are passageways within one
closed cooling circuit (Answer, pp. 3-4).
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