Ex Parte Lee et al - Page 1



              The opinion in support of the decision being entered today was not written for                                       
                           publication and is not binding precedent of the Board.                                                  

                             UNITED STATES PATENT AND TRADEMARK OFFICE                                                             
                                                ____________                                                                       
                                  BEFORE THE BOARD OF PATENT APPEALS                                                               
                                             AND INTERFERENCES                                                                     
                                                ____________                                                                       
                            Ex parte JU-HYUNG LEE, TROY KIM, SOOVO SEN,                                                            
                                JUAN CARLOS ROCHA-ALVAREZ, LUN TSUEL,                                                              
                                ANNAMALAI LAKSHMANAM, MAOSHENG ZHAO,                                                               
                               INNA SHMURUN, and SHANKAR VENKATARAMAN                                                              
                                                ____________                                                                       
                                           Appeal No. 2006-1871                                                                    
                                       Application No. 10/245,442                                                                  
                                                ____________                                                                       
                                                  ON BRIEF                                                                         
                                                ____________                                                                       
            Before KIMLIN, KRATZ and GAUDETTE, Administrative Patent Judges.                                                       
            KRATZ, Administrative Patent Judge.                                                                                    

                                           DECISION ON APPEAL                                                                      
                   This is a decision on appeal from the examiner's final                                                          
            rejection of claims 13, 15, 21, 23, 29, and 31, which are all of                                                       
            the claims pending in this application.  We have jurisdiction pursuant to                                              
            35 U.S.C. § 134.                                                                                                       
                                                BACKGROUND                                                                         
                   Appellants' invention relates to a method for cleaning a                                                        
            chemical vapor deposition chamber.  An understanding of the                                                            
            invention can be derived from a reading of exemplary claim 29,                                                         
            which is reproduced below.                                                                                             












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