UNITED STATES PATENT AND TRADEMARK OFFICE
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BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
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Ex parte MAKOTO KANDA
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Appeal 2007-2179
Application 10/247,825
Technology Center 1700
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Decided: October 15, 2007
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Before EDWARD C. KIMLIN, BRADLEY R. GARRIS, and
CHARLES F. WARREN, Administrative Patent Judges.
GARRIS, Administrative Patent Judge.
DECISION ON APPEAL
This is an appeal under 35 U.S.C. § 134 from the Examiner's decision
rejecting claims 1, 2, and 4-13. We have jurisdiction under 35 U.S.C. § 6.
We AFFIRM.
Appellant claims a manufacturing apparatus of a semiconductor
integrated circuit comprising a positive electrode 4, a negative electrode 5,
and an induction coil 8 for causing the semiconductor substrate to vibrate
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