Appeal No. 95-2413
Application 07/936,865
a target cathode,
a closed-loop magnet behind said target cathode,
said closed-loop magnet being rotatable about an axis
which passes through said target cathode, said magnet
having a shape which conforms to the shape of the target,
said closed-loop magnet further being shaped such
that when said magnet is rotated, the total arc length of
the portions of the magnet which pass beneath a point on
said target cathode surface a distance R from the axis of
rotation is substantially proportional to >(R)xR, for
values of R>R , where >(R) is a selected function
0
corresponding to a desired erosion profile and R is a
0
constant.
The examiner relies on the following references:
U.S. Patents
Elmgren et al. (Elmgren) 3,669,871 June 13, 1972
Wegmann et al. (Wegmann) 4,622,121 November 11, 1986
Suzuki et al. (Suzuki) 4,872,964 October 10, 1989
Japanese Laid-Open Patent Applications (Kokai)
Sato (Sato '375) 62-211375 September 17, 1987
Sato et al. (Sato '374) 63-149374 June 22, 1988
Sawada et al. (Sawada) 64-62462 March 8, 1989
Claims 13-18, 22, and 29-62 stand rejected under
35 U.S.C. § 103 as being unpatentable over either Suzuki or
Sato '374 or Sato '375 in view of Elmgren, Wegmann, and
Sawada.
- 3 -
Page: Previous 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Next
Last modified: November 3, 2007