Appeal No. 1998-2309 Page 10
Application No. 08/277,035
the claimed electrode. As to whether Swartz teaches or
suggests depositing a liquid barium strontium titanium (BST)
precursor directly on the substrate, we find that the passage
from column 4, lines 2-6 relied upon by the examiner is
further described (col. 8, lines 5-9) where Swartz discloses
that "[t]his invention will also have utility in improving the
crystallinity and/or reducing the annealing times of
ferroelectric thin films, even when the interlayer is not
required for crystallization of the perovskite phase." Swartz
further discloses (col. 8, lines 9-18) that sol-gel PZT thin
films require higher temperatures for crystallization into the
perovskite structure than do sol-gel derived from PbTiO . In
3
the table beginning at the bottom of col. 8, a number of
examples are given in which no interlayer (first layer that is
substantially insensitive to the substrate) is provided.
However, we observe that none of these examples includes BST
(which is sensitive to the substrate) as the second layer.
Thus, we agree with appellants (brief, page 9-10) that "Swartz
et al. never once reports the perovskite-phase crystallization
of a substrate-sensitive material in the absence of an
intermediate seed layer [first layer or interlayer], except in
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