Appeal No. 1998-2422
Application 08/488,380
appropriate size for positioning of a lithography tool. In
our opinion, one of ordinary skill in the art would have had
sufficient knowledge to recognize the applicability of the
system in Keogh to the positioning of objects other than PCB
layers.
Appellant argues that "[n]ot taught or suggested in Keogh
are the electronic sense amps needed to accurately sense the
small currents and fields of the present invention or the
necessity that the sense electronics be part of the membrane
mask in order to ensure that sensing can be effected" (Br4)
and that "Claims 77 and 83 both, either explicitly or
implicitly, call for sensing circuitry as part of the
lithography tool" (Br5).
The Examiner does not respond to this argument. In
particular, the Examiner does not address the limitation of "a
control logic unit mounted on the membrane" in claim 83.
However, we do not base our decision on this limitation. It
is noted that method claim 77 does not expressly or impliedly
require the sensing circuitry to be part of the lithography
tool.
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