THIS OPINION WAS NOT WRITTEN FOR PUBLICATION
The opinion in support of the decision being entered
today (1) was not written for publication in a law
journal and (2) is not binding precedent of the Board.
Paper No. 21
UNITED STATES PATENT AND TRADEMARK OFFICE
________________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
________________
Ex parte HIROSHI KOJIMA, YOSHIFUMI TAHARA
and IZUMI ARAI
________________
Appeal No. 95-0142
Application 07/817,9611
________________
HEARD: February 5, 1998
________________
Before METZ, GARRIS and WALTZ, Administrative Patent Judges.
GARRIS, Administrative Patent Judge.
DECISION ON APPEAL
This is a decision on an appeal from the final rejection of
claims 14 through 19 and 21 through 28 which are all of the
claims remaining in the application.
The subject matter on appeal relates to a method of plasma-
etching a wafer which includes the post-etching steps of
1Application for patent filed January 8, 1992. According
to appellants, this application is a continuation of Application
07/510,124, filed April 17, 1990, now abandoned.
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