Appeal No. 95-1375
Application 08/023,602
machining the edge of the protective layer, but machining through the protective layer. The
examiner’s conclusion that one having ordinary skill in the art would have been led to the claimed
subject matter because the art teaches the necessity of protecting the surface of the areas to be
contacted by the machining tool does not explain how the teachings of the disclosed state of the prior
art and especially Okano, who forms a protective layer only over the dielectric layer and who does
not machine along the edge of the protective layer, would have led a person having ordinary skill in
the art to conclude that the delamination problem would have been solved by forming a protective
structure in the dielectric layer and on the substrate, and machining the dielectric layer and substrate
along the protective structure.
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Last modified: November 3, 2007