Appeal No. 95-3451
Application No. 08/097,588
The subject matter on appeal relates to a method of
introducing a gas to a chamber, to a method of changing the
gas pressure within a chamber and to a processing system
having a chamber which gas enters or leaves. The
aforementioned methods and system involve a tube disposed
through a wall of the chamber wherein the tube includes a gas
diffuser through which gas flows. Further details of this
appealed subject matter are set forth in illustrative claims
9, 11 and 13 which read as follows:
9. A method of introducing a gas to a chamber,
comprising the steps of:
providing at least one tube disposed through a wall of
said chamber, said tube including a gas diffuser formed from a
porous material disposed thereon, said gas diffuser having a
circumferential radius less than or equal to the radius of
said tube;
introducing a gas at a selected velocity to said chamber
through said tube; and
slowing the velocity of said gas by flowing said gas
through said gas diffuser such that gas flow is redistributed
through a plurality of microscopic holes in said gas diffuser.
11. The method of claim 9 wherein said gas diffuser is
disposed within said tube outside said chamber.
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