Appeal No. 95-2413
Application 07/936,865
Second, in our opinion, appellants have misinterpreted
the teachings of Suzuki and thus have not fairly analyzed its
teachings. Appellants interpret Suzuki to mean that L(r) is
the arc length across the width of the plasma path at a radius
r as shown in appellants' figure 14A. We interpret Suzuki's
description of the plasma having "a very narrow width"
(col. 5, lines 60-61) as meaning that L(r) is the arc length
swept by a portion of the curve 67 at a radius r. That is, a
point on curve 67 (assumed to be a very small area because the
path has a "very narrow width") at a distance r from the axis
of rotation traces a narrow path of circumference of 2Br on
the target and the velocity of the point is Tr, so
2Br/Tr = constant. This means that any small area in the
region swept by any point on curve 67 is exposed to the plasma
for the same period of time and the erosion rate is constant.
This same interpretation applies to Sato '375 and Sato '374.
Appellants have not analyzed "a very narrow width" plasma path
having a spiral shape as shown in Suzuki, Sato '375, and Sato
'374.
Third, appellants' showings with respect to Sato '375 in
figures 15A and 15B are not persuasive since there appears to
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