Appeal No. 1995-3349 Page 3
Application No. 08/066,994
deaerating a first non-chlorofluorocarbon aqueous cleaning
solution to a first dissolved oxygen content ranging from 2 to
5 ppm for removing solid foreign matter attached to said
workpiece by oil;
deaerating a second non-chlorofluorocarbon aqueous
cleaning solution to a second dissolved oxygen content
different from said first dissolved oxygen content and ranging
from 0.01 to 5 ppm for removing burrs from said workpiece;
heating said first and second aqueous cleaning solutions
to a temperature ranging from 30° to 55° C;
supplying a first ultrasonic cleaning tank having an
ultrasonic vibrator mounted on a bottom thereof with said first
aqueous cleaning solution which has been deaerated to said
first dissolved oxygen content;
supplying a second ultrasonic cleaning tank having an
ultrasonic vibrator mounted on a bottom thereof with said
second aqueous cleaning solution which has been deaerated to
said second dissolved oxygen content;
immersing a workpiece in said first cleaning solution in
said first ultrasonic cleaning tank;
radiating ultrasonic energy from the ultrasonic vibrator
in the first cleaning tank to remove said solid foreign matter
attached to said workpiece by oil off the workpiece;
immersing said workpiece in said second cleaning solution
in said second cleaning tank; and
radiating ultrasonic energy from the ultrasonic vibrator
in the second cleaning tank to remove said burrs off the
workpiece.
The prior art references of record relied upon by the
examiner in rejecting the appealed claims are:
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