Appeal No. 1997-1427
Application No. 08/483,777
The disclosed invention relates to a micromechanical
device, and to a method of manufacturing the same.
Claim 8 is illustrative of the claimed invention, and it
reads as follows:
8. A method for manufacturing a digital micromirror
device, wherein said method comprises:
forming activation circuitry upon a semiconductor wafer,
wherein said activation circuitry includes surfaces with a
first bias and surfaces with a second bias;
depositing a pad film upon said activation circuitry,
wherein said pad film acts as an insulator between said
surfaces having said first bias and said surfaces having said
second bias;
building a spacer layer upon said pad film;
cutting vias into said spacer layer;
laying a first metal layer upon said spacer layer such
that said first metal fills said vias;
depositing a second metal layer upon said first metal
layer and patterning and etching said second layer to form
mirrors and hinges; and
removing said spacer layer such that said mirror is held
at said second bias and is suspended over said activation
circuitry by said hinges and when activated contacts said
surfaces having said second bias.
The references relied on by the examiner are:
Hornbeck 5,083,857 Jan. 28,
1992
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