Appeal No. 1998-2971
Application No. 08/690,274
conductive support arms that connect the bolometer to the
circuitry on the substrate, and the width of the support arms
is greater than the spacing between adjacent bolometers. The
bolometers are connected in parallel.
Claims 1 and 5 are illustrative of the claimed invention,
and they read as follows:
1. A radiation detector, comprising:
(a) a substrate containing circuitry;
(b) a plurality of bolometers, each of
said bolometers suspended over said
substrate, each of said bolometers
with resistance dependent upon
temperature; and
(c) each of said bolometers with a plurality
of support arms supporting said each
bolometer on said substrate, said support
arms located between said bolometers and
said substrate, and said support arms
include conductors connecting said
bolometers to said circuitry.
5. A radiation detector, comprising:
(a) a substrate containing circuitry;
(b) a planar array of bolometers, each
of said bolometers suspended over said
substrate, each of said bolometers with
resistance dependent upon temperature;
and
(c) each of said bolometers with a plurality
3
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