Appeal No. 1998-3000
Application No. 08/485,412
The references relied on by the examiner are:
Herndon et al. (Herndon) 4,843,034
Jun. 27, 1989
Mihara 4,922,317 May 1,
1990
Tanaka et al. (Tanaka) 5,100,762 Mar. 31,
1992
(filed Jul. 9,
1990)
Schoch, Jr. et al. (Schoch) 5,250,388 Oct. 5,
1993
(filed May 31,
1988)
Jensen, “Polyimides as Interlayer Dielectrics for High-
Performance Interconnections of Integrated Circuits,” Polymers
For High Technology, 466-83 (American Chemical Society, 1987).
Claims 2 through 7, 9 through 13, 20 through 22, 24
through 29, 70, 73, 74, 76, 101 through 103 and 112 through
120 stand rejected under 35 U.S.C. § 103(a) as being
unpatentable over Schoch considered alone or in combination
with Tanaka.
Claims 8, 14 through 18, 25, 70, 73, 74 and 76 stand
rejected under 35 U.S.C. § 103(a) as being unpatentable over
Schoch and Tanaka in further view of Herndon.
Claims 15 through 18, 29, 51, 55 through 58 and 112
through 120 stand rejected under 35 U.S.C. § 103(a) as being
unpatentable over Schoch, Tanaka and Herndon in further view
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