Appeal No. 2000-0310
Application 08/848,759
flangeless feed through which is useful in the supplying of
power
to a device through a passage in a wall of a vacuum chamber
such as a semiconductor processing chamber. Claim 1 is
illustrative:
1. A flangeless feed through for supplying power to a
device through a passage in a wall of a vacuum chamber, the
feed through comprising:
an insulator ring securely positioned in the passage;
a first threaded insert; and
a second threaded insert which engages the first threaded
insert;
wherein the insulator ring is gripped by the first and
second threaded inserts.
THE REFERENCE
Cheng et al. (Cheng) 5,772,473 Jun. 30,
1998
(filed Jan. 2,
1997)
THE REJECTIONS
Claims 1-13 stand rejected under 35 U.S.C. § 102(e) as
being anticipated by or, in the alternative, under 35 U.S.C.
2
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