Appeal No. 2000-1482 Page 18
Application No. 08/995,706
different size cassettes. As shown in Figure 7 of Hertel, the
cassette holder 200 includes two sets of support blocks 232,
233, 234, 235 which provide support for cassettes 110, 111.
Goff discloses in Figure 2 a wafer cassette transfer
platform located on top of the system of Figure 1, having a
quartz cassette positioned thereon. Goff teaches (column 5,
line 50+) that upper surface 61 of cabinet 11 has an opening
62 formed therein within which is positioned a wafer cassette
transfer platform 63. As shown, the opening 62 includes
peripheral mounting edges 64 within which can be received a
cassette transfer platform 63 having a plurality of different
configurations in order to accept wafer cassette carriers of
different configurations. Goff provides that this enables his
system to be readily adapted to handling various cassettes
and/or different carriers having a variety of spacing between
wafers and/or wafer support bar configurations. The modular,
removable framework of the cassette transfer platform 63 is
positioned within the opening 62 in the upper surface 61 of
the cabinet 11. The platform 63 includes a generally planar
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