Appeal No. 1998-1637
Application No. 08/389,119
The subject matter on appeal relates to a method of
forming a coating film which includes the step of rotating an
object to be processed in the form of a plate in a first
rotational action at a low speed for dispersing the
application liquid on the surface of the object and in a
second rotational action at a high speed for adjusting a
thickness of the dispersed application liquid on the surface
of the object. This appealed subject matter is adequately
illustrated by independent claim 1 which reads as follows:
1. A method of forming a coating film by dropping
application liquid on a surface of an object to be processed
in the form of a plate having irregularities formed thereon
and dispersing the application liquid on the surface of the
object using a centrifugal force generated by rotating the
object, comprising the steps of:
rotating an object to be processed in the form of a plate
in a first rotational action at a low speed for dispersing the
application liquid on the surface of the object and in a
second rotational action at a high speed for adjusting a
thickness of the dispersed application liquid on the surface
of the object, said first and second rotational actions being
separated by a time interval; and
setting the time interval between the first and the
second rotational actions to a value equal to or greater than
ten times a duration of the first rotational action and
setting a duration of the second rotational action to a value
equal to or greater than three times the duration of the first
rotational action.
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