Appeal No. 1999-0908
Application No. 08/388,425
second region has a configuration of a layer, said layer
extending above and along said outwardly facing target
surface, and wherein said magnetic field is configured so
as to localize and shift said plasma away from said
substrate.
In support of his rejections, the examiner relies on the
following prior art references:
Knowles et al. (Knowles) 3,669,860
Jun. 13, 1972
Boucher et al. (Boucher) 4,094,764
Jun. 13, 1978
Claims 1, 2, 4, 5, 21, 23 through 25 and 27 through 31
stand rejected under 35 U.S.C. § 103 as unpatentable over the
combined disclosures of Boucher and Knowles.
We reverse the aforementioned § 103 rejection for
essentially those reasons expressed in the Brief. We only add
that neither Boucher nor Knowles alone, or in combination,
would have suggested using the claimed gradient of magnetic
field strength directed from an anode to a target, wherein
“the magnetic strength of said magnetic field within a first
region situated adjacent to said anode exceeds a magnetic
field strength within a second region situated adjacent to
said target by at least 25% . . . . ” As correctly pointed
out by appellants, both Boucher and Knowles do not teach or
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