The opinion in support of the decision being entered today was not
written for publication and is not binding precedent of the Board.
Paper No. 16
UNITED STATES PATENT AND TRADEMARK OFFICE
____________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
____________
Ex parte ULRICH PATZ and GERD ICKES
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Appeal No. 2000-1010
Application No. 08/951,402
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ON BRIEF
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Before KIMLIN, LIEBERMAN and KRATZ, Administrative Patent Judges.
KRATZ, Administrative Patent Judge.
DECISION ON APPEAL
This is a decision on appeal from the examiner's final
rejection of claims 6-13, which are all of the claims pending in
this application.
BACKGROUND
Appellants' invention relates to a vacuum treating apparatus
including a plurality of treatment stations and airlocks. An
inner cylinder inside a vacuum chamber wall holds substrates for
rotation through the stations. The airlocks are diametrically
opposed to one another and each is associated with a transport
conveyor. The treatment stations extend radially outwardly from
the vacuum chamber wall. The apparatus is constructed such that
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